TY  - BOOK
AU  - Knystautas,Emile
TI  - Engineering thin films and nanostructures with ion beams
T2  - Optical engineering
SN  - 082472447X (alk. paper)
AV  - TA418.9.T45 E52 2005
U1  - 621.3815/2 22
PY  - 2005///
CY  - Boca Raton, FL : 
PB  - Taylor & Francis
KW  - Thin films
KW  - Nanostructures
KW  - Ion bombardment
KW  - Industrial applications
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0648/2004058212-d.html
ER  -