Engineering thin films and nanostructures with ion beams / edited by Emile Knystautas. - Boca Raton, FL : Taylor & Francis, c2005 - 574 p. : ill. ; 24 cm + 1 CD-ROM (4 3/4 in.) - Optical engineering ; 92 . - Optical engineering (Marcel Dekker, Inc.) ; v. 92. .

Includes bibliographical references and index.

082472447X (alk. paper) 9780824724474

2004058212


Thin films.
Nanostructures.
Ion bombardment--Industrial applications.

TA418.9.T45 / E52 2005

621.3815/2
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